Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040167 | Diagnosis apparatus, plasma processing apparatus and diagnosis method | Kenji Tamaki, Masahiro Sumiya, Masaki Ishiguro | 2024-07-16 |
| 12014909 | Plasma processing apparatus and plasma processing system | Ryoji Asakura, Daisuke Shiraishi, Akira Kagoshima, Satomi Inoue | 2024-06-18 |