Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131964 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Soichiro Eto, Tsubasa Okamoto, Tatehito Usui, Shigeru Nakamoto | 2024-10-29 |
| 12062530 | Vacuum processing apparatus and vacuum processing method | Yusuke Yoshida, Shigeru Nakamoto, Kosuke Fukuchi | 2024-08-13 |
| 12051575 | Plasma processing apparatus and plasma processing method | Tsubasa Okamoto, Soichiro Eto | 2024-07-30 |
| 12014909 | Plasma processing apparatus and plasma processing system | Shota Umeda, Daisuke Shiraishi, Akira Kagoshima, Satomi Inoue | 2024-06-18 |