Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131964 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Ryoji Asakura, Soichiro Eto, Tsubasa Okamoto, Shigeru Nakamoto | 2024-10-29 |
| 12051574 | Wafer processing method and plasma processing apparatus | Hiroyuki Kobayashi, Atsushi Sekiguchi, Soichiro Eto, Shigeru Nakamoto, Kazunori Shinoda +1 more | 2024-07-30 |
| 11915951 | Plasma processing method | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Naoyuki Kofuji, Yutaka Kouzuma +4 more | 2024-02-27 |
| 11875978 | Plasma processing apparatus and plasma processing method | Tsubasa Okamoto, Miyako Matsui, Shigeru Nakamoto, Naohiro Kawamoto, Atsushi Sekiguchi | 2024-01-16 |