Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051574 | Wafer processing method and plasma processing apparatus | Hiroyuki Kobayashi, Tatehito Usui, Soichiro Eto, Shigeru Nakamoto, Kazunori Shinoda +1 more | 2024-07-30 |
| 11875978 | Plasma processing apparatus and plasma processing method | Tsubasa Okamoto, Tatehito Usui, Miyako Matsui, Shigeru Nakamoto, Naohiro Kawamoto | 2024-01-16 |