Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131964 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Ryoji Asakura, Soichiro Eto, Tsubasa Okamoto, Tatehito Usui | 2024-10-29 |
| 12062530 | Vacuum processing apparatus and vacuum processing method | Yusuke Yoshida, Kosuke Fukuchi, Ryoji Asakura | 2024-08-13 |
| 12051574 | Wafer processing method and plasma processing apparatus | Hiroyuki Kobayashi, Atsushi Sekiguchi, Tatehito Usui, Soichiro Eto, Kazunori Shinoda +1 more | 2024-07-30 |
| 11875978 | Plasma processing apparatus and plasma processing method | Tsubasa Okamoto, Tatehito Usui, Miyako Matsui, Naohiro Kawamoto, Atsushi Sekiguchi | 2024-01-16 |