Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051574 | Wafer processing method and plasma processing apparatus | Hiroyuki Kobayashi, Atsushi Sekiguchi, Tatehito Usui, Soichiro Eto, Shigeru Nakamoto +1 more | 2024-07-30 |
| 11915951 | Plasma processing method | Hiroyuki Kobayashi, Kazunori Shinoda, Tatehito Usui, Naoyuki Kofuji, Yutaka Kouzuma +4 more | 2024-02-27 |