Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154765 | Plasma processing apparatus and plasma processing method | Nanako Tamari, Kosa Hirota, Masahiro Sumiya | 2024-11-26 |
| 12046456 | Inspection method of plasma processing apparatus | Kota Kakimoto, Yusuke Takegawa | 2024-07-23 |