Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100576 | Metal oxide preclean chamber with improved selectivity and flow conductance | Andrew Nguyen, Xue Yang Chang, Xianmin Tang, John C. Forster, Yogananda Sarode Vishwanath +2 more | 2024-09-24 |
| 11967525 | Selective tungsten deposition at low temperatures | Yi Xu, Yufei Hu, Kazuya Daito, Da He, Jiajie Cen | 2024-04-23 |
| 11958038 | Reductive boron nitride with extended reactive vacancies for catalytic applications | Mauricio Terrones, He Liu, Kazunori FUJISAWA, Ana Laura Elias Arriaga, Tianyi Zhang +4 more | 2024-04-16 |
| 11955381 | Low-temperature plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Kazuya Daito, Geraldine VASQUEZ, Da He +2 more | 2024-04-09 |
| 11955319 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Takashi Kuratomi, Jallepally Ravi, Pingyan Lei +1 more | 2024-04-09 |
| 11948836 | Deposition of metal films with tungsten liner | Sang-Hyeob Lee, Chris Pabelico, Yi Xu, Tae Hong Ha, Xianmin Tang +1 more | 2024-04-02 |
| 11929691 | Triboelectric generator systems and methods for energy harvesting and sensing applications | Gang Wang, Moonhyung Jang, Jacob Lee | 2024-03-12 |