Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1049067 | Ring for an anti-rotation process kit for a substrate processing chamber | Rohan Rane, Xue Yang Chang, Daniel Sang Byun | 2024-10-29 |
| 12068137 | Thread profiles for semiconductor process chamber components | Reyn Tetsuro WAKABAYASHI, Carlaton WONG | 2024-08-20 |
| 12030135 | Methods to fabricate chamber component holes using laser drilling | Sumit Agarwal | 2024-07-09 |
| 12020977 | Lift pin assembly | Alexander SULYMAN, Anwar Husain, Carlaton WONG, Xue Yang Chang | 2024-06-25 |
| 11959174 | Shunt door for magnets in plasma process chamber | Kallol Bera, Sathya Swaroop Ganta, Kaushik Alayavalli, Akshay Dhanakshirur, Stephen C. Garner +1 more | 2024-04-16 |