Issued Patents 2024
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142477 | Chalcogen precursors for deposition of silicon nitride | Chandan Kr Barik, Michael Haverty, Muthukumar Kaliappan, Cong Trinh, John Sudijono +3 more | 2024-11-12 |
| 12131900 | Methods for depositing blocking layers on metal surfaces | Mark Saly, Lakmal C. Kalutarage, Thomas Knisley | 2024-10-29 |
| 12110584 | Low temperature growth of transition metal chalcogenides | Chandan Das, Susmit Singha Roy, John Sudijono, Abhijit Basu Mallick, Mark Saly | 2024-10-08 |
| 12094766 | Selective blocking of metal surfaces using bifunctional self-assembled monolayers | Michael L. McSwiney, Mark Saly, Drew Phillips, Aaron Dangerfield, David Thompson +2 more | 2024-09-17 |
| 12068170 | Vapor phase thermal etch solutions for metal oxo photoresists | Lakmal C. Kalutarage, Mark Saly, Madhur Sachan, Regina Freed | 2024-08-20 |
| 12060370 | Molybdenum (0) precursors for deposition of molybdenum films | Andrea Leoncini, Paul Mehlmann, Nemanja Dordevic, Han Vinh Huynh, Doreen Wei Ying Yong +1 more | 2024-08-13 |
| 12040427 | Preclean and encapsulation of microLED features | Thomas Knisley, Mark Saly, Mingwei Zhu | 2024-07-16 |
| 12031209 | Reducing agents for atomic layer deposition | Mark Saly, Lakmal C. Kalutarage, Thomas Knisley | 2024-07-09 |
| 12033866 | Vapor phase thermal etch solutions for metal oxo photoresists | Lakmal C. Kalutarage, Mark Saly, Madhur Sachan, Regina Freed | 2024-07-09 |
| 12014925 | Metal-doped carbon hardmasks | Eswaranand Venkatasubramanian, Mark Saly, Abhijit Basu Mallick | 2024-06-18 |
| 11990369 | Selective patterning with molecular layer deposition | Zeqing Shen, Susmit Singha Roy, Abhijit Basu Mallick | 2024-05-21 |
| 11990332 | Methods and apparatus for deposition of low-k films | Mark Saly, Zhelin Sun, Ning Li, Mihaela Balseanu, Li-Qun Xia +2 more | 2024-05-21 |
| 11987875 | Semiconductor device patterning methods | Yong Wang, Doreen Wei Ying Yong, John Sudijono | 2024-05-21 |
| 11970777 | Deposition of low-k films | Shuaidi Zhang, Ning Li, Mihaela Balseanu, Mark Saly, Thomas Knisley | 2024-04-30 |
| 11972940 | Area selective carbon-based film deposition | Xinke Wang, Zeqing Shen, Susmit Singha Roy, Abhijit Basu Mallick, Jiecong Tang +2 more | 2024-04-30 |
| 11886120 | Deposition of semiconductor integration films | Lakmal C. Kalutarage, Mark Saly, Thomas Knisley, Kelvin Chan, Regina Freed +3 more | 2024-01-30 |
| 11859278 | Molecular layer deposition of amorphous carbon films | Mark Saly, Ahbijit Basu Mallick, Eugene Yu Jin Kong, Bo Qi | 2024-01-02 |