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Self aligned replacement metal source/drain FINFET |
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| 11990410 |
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| 11961759 |
Interconnects having spacers for improved top via critical dimension and overlay tolerance |
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Top via with damascene line and via |
Lawrence A. Clevenger, Brent A. Anderson, Kisik Choi, Nicholas Anthony Lanzillo, Christopher J. Penny |
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| 11869808 |
Top via process with damascene metal |
Lawrence A. Clevenger, Brent A. Anderson, Nicholas Anthony Lanzillo, Christopher J. Penny, Kisik Choi |
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| 11869937 |
Semiconductor device and method of forming the semiconductor device |
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| 11869936 |
Semiconductor device and method of forming the semiconductor device |
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