Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181790 | Reflective mask blank and reflective mask | Shohei Mimura, Hideo Kaneko | 2024-12-31 |
| 11940391 | Defect inspection apparatus, method for inspecting defect, and method for manufacturing photomask blank | Ryusei Terashima, Takumi Yoshino | 2024-03-26 |
| 11860529 | Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank | Yukio Inazuki, Takuro Kosaka, Hideo Kaneko, Kazuhiro Nishikawa | 2024-01-02 |