Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12124162 | Substrate with film for reflective mask blank, reflective mask blank, and method for manufacturing reflective mask | Taiga OGOSE | 2024-10-22 |
| 12111215 | Imaging device and calibration method | Naoki Kawazu, Takumi Oka | 2024-10-08 |
| 12050396 | Reflective mask blank, method of manufacturing thereof, and reflective mask | Shohei Mimura, Takuro Yamamoto, Yukio Inazuki | 2024-07-30 |
| 11860529 | Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank | Yukio Inazuki, Tsuneo Terasawa, Hideo Kaneko, Kazuhiro Nishikawa | 2024-01-02 |