Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050396 | Reflective mask blank, method of manufacturing thereof, and reflective mask | Takuro Kosaka, Shohei Mimura, Takuro Yamamoto | 2024-07-30 |
| 11860529 | Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank | Tsuneo Terasawa, Takuro Kosaka, Hideo Kaneko, Kazuhiro Nishikawa | 2024-01-02 |