Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158313 | Cooling device | Koji Murakami | 2024-12-03 |
| 12061057 | Heat dissipation member including fin groups | Yi-Huan Kao | 2024-08-13 |
| 12012316 | Winding machine and method of controlling driving of winding machine | — | 2024-06-18 |
| 11860529 | Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank | Yukio Inazuki, Tsuneo Terasawa, Takuro Kosaka, Hideo Kaneko | 2024-01-02 |