Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181790 | Reflective mask blank and reflective mask | Shohei Mimura, Tsuneo Terasawa | 2024-12-31 |
| 11860529 | Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank | Yukio Inazuki, Tsuneo Terasawa, Takuro Kosaka, Kazuhiro Nishikawa | 2024-01-02 |