Issued Patents 2024
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176243 | Method and apparatus for filling a recess formed within a substrate surface | Zecheng Liu | 2024-12-24 |
| 12138654 | Vapor phase deposition of organic films | Marko Tuominen, Hannu Huotari | 2024-11-12 |
| 12134108 | Vapor phase deposition of organic films | Marko Tuominen, Hannu Huotari | 2024-11-05 |
| 12104244 | Methods and systems for filling a gap | Charles Dezelah, Timothee Blanquart, René Henricus Jozef Vervuurt | 2024-10-01 |
| 12107005 | Deposition method and an apparatus for depositing a silicon-containing material | Zecheng Liu, Tommi Tynell, Yu Xu, Mikko Ruoho | 2024-10-01 |
| 12094769 | Methods for filling a gap and related systems and devices | Zecheng Liu, Jia Yao, René Henricus Jozef Vervuurt | 2024-09-17 |
| 12027365 | Methods for filling a gap and related systems and devices | Zecheng Liu, Sunja Kim, Jia Yao, Ranjit Borude, Bablu Mukherjee +4 more | 2024-07-02 |
| 11996286 | Silicon precursors for silicon nitride deposition | Charles Dezelah, Hideaki Fukuda | 2024-05-28 |
| 11996284 | Formation of SiOCN thin films | Toshiya Suzuki | 2024-05-28 |
| 11990333 | Method and apparatus for filling a gap | Werner Knaepen, Bert Jongbloed, Dieter Pierreux, Gido Van Der Star, Toshiya Suzuki | 2024-05-21 |
| 11975357 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen +2 more | 2024-05-07 |