Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12107005 | Deposition method and an apparatus for depositing a silicon-containing material | Zecheng Liu, Viljami Pore, Tommi Tynell, Yu Xu | 2024-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12107005 | Deposition method and an apparatus for depositing a silicon-containing material | Zecheng Liu, Viljami Pore, Tommi Tynell, Yu Xu | 2024-10-01 |