Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12107005 | Deposition method and an apparatus for depositing a silicon-containing material | Zecheng Liu, Viljami Pore, Tommi Tynell, Mikko Ruoho | 2024-10-01 |
| 11881679 | Gallium nitride substrate and semiconductor composite substrate | Jianfeng Wang, Ke Xu | 2024-01-23 |