Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170197 | Selective passivation and selective deposition | Eva Tois, Raija H. Matero, Elina Färm, Delphine Longrie, Hidemi Suemori +5 more | 2024-12-17 |
| 12154785 | Deposition of oxide thin films | Elina Färm, Raija H. Matero, Eva Tois, Hidemi Suemori, Antti Niskanen +2 more | 2024-11-26 |
| 12094686 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Marko Tuominen, Chiyu Zhu | 2024-09-17 |
| 12080548 | Selective deposition using hydrophobic precursors | Elina Färm, Hidemi Suemori, Raija H. Matero, Antti Niskanen, Eva Tois | 2024-09-03 |
| 12024772 | Apparatuses for thin film deposition | Jun Kawahara, Antti Niskanen, Eva Tois, Raija H. Matero, Hidemi Suemori +2 more | 2024-07-02 |
| 11975357 | Selective deposition of metals, metal oxides, and dielectrics | Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2024-05-07 |
| 11967488 | Method for treatment of deposition reactor | Eric James Shero, Fred Alokozai, Dong Li, Jereld Lee Winkler, Xichong Chen | 2024-04-23 |