Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11967488 | Method for treatment of deposition reactor | Suvi Haukka, Eric James Shero, Fred Alokozai, Dong Li, Xichong Chen | 2024-04-23 |
| 11946136 | Semiconductor processing device | Eric James Shero, Carl Louis White, Shankar Swaminathan, Bhushan Zope | 2024-04-02 |
| 11891693 | Systems and methods for controlling vapor phase processing | Cheuk Li, Michael F. Schultz, John Kevin Shugrue | 2024-02-06 |