Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11976361 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, Robert Brennan Milligan, William George Petro, Eric Wang, Dong Li +3 more | 2024-05-07 |
| 11967488 | Method for treatment of deposition reactor | Suvi Haukka, Eric James Shero, Dong Li, Jereld Lee Winkler, Xichong Chen | 2024-04-23 |