Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12145236 | Containment and exhaust system for substrate polishing components | Daniel Ray Trojan | 2024-11-19 |
| 11939673 | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment | Carl Louis White | 2024-03-26 |
| 11891693 | Systems and methods for controlling vapor phase processing | Jereld Lee Winkler, Cheuk Li, Michael F. Schultz | 2024-02-06 |