Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12145236 | Containment and exhaust system for substrate polishing components | John Kevin Shugrue | 2024-11-19 |
| 12023778 | Substrate carrier head and processing system | William Manfred Daschbach | 2024-07-02 |
| 11904431 | Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing | — | 2024-02-20 |