Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170197 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Raija H. Matero, Elina Färm, Delphine Longrie +5 more | 2024-12-17 |
| 12148609 | Silicon oxide deposition method | Varun Sharma, Daniele Chiappe, Eva Tois, Viraj Madhiwala, Charles Dezelah +2 more | 2024-11-19 |
| 12138654 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2024-11-12 |
| 12136552 | Toposelective vapor deposition using an inhibitor | Andrea Illiberi, Varun Sharma, Michael Eugene Givens, Shaoren Deng | 2024-11-05 |
| 12134108 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2024-11-05 |
| 12094686 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2024-09-17 |
| 11975357 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Hannu Huotari +2 more | 2024-05-07 |
| 11898240 | Selective deposition of silicon oxide on dielectric surfaces relative to metal surfaces | Andrea Illiberi, Giuseppe Alessio Verni, Shaoren Deng, Daniele Chiappe, Eva Tois +1 more | 2024-02-13 |