Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170197 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Raija H. Matero, Elina Färm, Delphine Longrie +5 more | 2024-12-17 |
| 12154785 | Deposition of oxide thin films | Suvi Haukka, Elina Färm, Raija H. Matero, Eva Tois, Antti Niskanen +2 more | 2024-11-26 |
| 12080548 | Selective deposition using hydrophobic precursors | Elina Färm, Raija H. Matero, Antti Niskanen, Suvi Haukka, Eva Tois | 2024-09-03 |
| 12033849 | Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silane | Yuko Kengoyama, Ryu Nakano | 2024-07-09 |
| 12024772 | Apparatuses for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Eva Tois, Raija H. Matero +2 more | 2024-07-02 |