Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074022 | Method and system for forming patterned structures using multiple patterning process | Naoki Inoue, Shinya Yamada, Mao Tsuchiya | 2024-08-27 |
| 12033849 | Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silane | Yuko Kengoyama, Hidemi Suemori | 2024-07-09 |
| 11970769 | Cyclical deposition methods | Trigagema Gama | 2024-04-30 |