Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033849 | Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silane | Hidemi Suemori, Ryu Nakano | 2024-07-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033849 | Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silane | Hidemi Suemori, Ryu Nakano | 2024-07-09 |