Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12129546 | Methods and apparatuses for flowable gap-fill | Shinya Yoshimoto, Takahiro Onuma, Makoto Igarashi, Yukihiro Mori, Hideaki Fukuda +1 more | 2024-10-29 |
| 12112940 | Method of forming topology-controlled amorphous carbon polymer film | — | 2024-10-08 |
| 12104244 | Methods and systems for filling a gap | Charles Dezelah, René Henricus Jozef Vervuurt, Viljami Pore | 2024-10-01 |
| 11972944 | Method for depositing a gap-fill layer by plasma-assisted deposition | — | 2024-04-30 |
| 11923190 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | — | 2024-03-05 |