Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12129546 | Methods and apparatuses for flowable gap-fill | Shinya Yoshimoto, Takahiro Onuma, Makoto Igarashi, Hideaki Fukuda, René Henricus Jozef Vervuurt +1 more | 2024-10-29 |
| 12125722 | Multi-stage substrate processing system | — | 2024-10-22 |
| 12106944 | Rotating substrate support | — | 2024-10-01 |
| 12024772 | Apparatuses for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Eva Tois, Raija H. Matero +2 more | 2024-07-02 |
| 12002661 | Susceptor having cooling device | Melvin Verbaas | 2024-06-04 |
| 11986868 | System dedicated for parts cleaning | — | 2024-05-21 |