Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130084 | Vertical batch furnace assembly comprising a cooling gas supply | Christianus G.M. de Ridder | 2024-10-29 |
| 12094753 | Stage device and substrate processing apparatus | Einosuke Tsuda, Kentaro Asakura | 2024-09-17 |
| 12002661 | Susceptor having cooling device | Yukihiro Mori | 2024-06-04 |
| 11976361 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, Robert Brennan Milligan, William George Petro, Eric Wang, Fred Alokozai +3 more | 2024-05-07 |