Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130084 | Vertical batch furnace assembly comprising a cooling gas supply | Melvin Verbaas | 2024-10-29 |
| 12009241 | Vertical batch furnace assembly with detector to detect cassette | — | 2024-06-11 |
| 11996309 | Wafer boat handling device, vertical batch furnace and method | — | 2024-05-28 |