Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more | 2024-12-10 |
| 11860973 | Method and system for foreline deposition diagnostics and control | Ala Moradian, Martin A. Hilkene, Zuoming ZHU, Errol Antonio C. Sanchez, Bindusagar Marath Sankarathodi +1 more | 2024-01-02 |