Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Daniel Sang Byun +5 more | 2024-06-11 |
| 11991897 | Display apparatus with spaced shielding wall portions within display area and peripheral area | Kyunghae PARK, Minhee Kim, DOKYUNG YOUN, Minjae KIM, Taehoon Kim +6 more | 2024-05-21 |
| 11955318 | Ash rate recovery method in plasma strip chamber | Yongkwan Kim, Kyeong-Tae Lee, Chung Hoan Kim, Youngmin SHIN | 2024-04-09 |