Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11780946 | Alternating copolymer, method of producing alternating copolymer, method of producing polymeric compound, and method of forming resist pattern | Akiyoshi Yamazaki, Daisuke Kawana, Masatoshi Arai, Nobuhiro MICHIBAYASHI, Takatoshi Inari | 2023-10-10 |
| 11747724 | Organically modified metal oxide nanoparticles, organically modified metal oxide nanoparticles-containing solution, organically modified metal oxide nanoparticles-containing resist composition, and resist pattern forming method | Kiwamu Sue, Sho KATAOKA, Yusuke YOSHIGOE, Takatoshi Inari, Masatoshi Arai +2 more | 2023-09-05 |
| 11709425 | Resist composition and method of forming resist pattern | Takaya Maehashi | 2023-07-25 |
| 11703756 | Resist composition and method of forming resist pattern | Koshi Onishi, KhanhTin Nguyen, Masatoshi Arai | 2023-07-18 |
| 11667605 | Resist composition, method of forming resist pattern, compound, acid generator, and method of producing compound | Hiroto Yamazaki, Masatoshi Arai | 2023-06-06 |
| 11560444 | Method of producing block copolymer capable of creating specific structure pattern | Teruaki Hayakawa, Seina Yamazaki, Akiyoshi Yamazaki, Daisuke Kawana, Takaya Maehashi +1 more | 2023-01-24 |