Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11829068 | Resist composition, method of forming resist pattern, compound, and resin | Masatoshi Arai, Junichi Miyakawa | 2023-11-28 |
| 11703756 | Resist composition and method of forming resist pattern | KhanhTin Nguyen, Masatoshi Arai, Yoshitaka Komuro | 2023-07-18 |