Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11829068 | Resist composition, method of forming resist pattern, compound, and resin | Koshi Onishi, Junichi Miyakawa | 2023-11-28 |
| 11780946 | Alternating copolymer, method of producing alternating copolymer, method of producing polymeric compound, and method of forming resist pattern | Akiyoshi Yamazaki, Daisuke Kawana, Yoshitaka Komuro, Nobuhiro MICHIBAYASHI, Takatoshi Inari | 2023-10-10 |
| 11754922 | Resist composition and method of forming resist pattern | KhanhTin Nguyen | 2023-09-12 |
| 11747724 | Organically modified metal oxide nanoparticles, organically modified metal oxide nanoparticles-containing solution, organically modified metal oxide nanoparticles-containing resist composition, and resist pattern forming method | Kiwamu Sue, Sho KATAOKA, Yusuke YOSHIGOE, Takatoshi Inari, Takaya Maehashi +2 more | 2023-09-05 |
| 11703756 | Resist composition and method of forming resist pattern | Koshi Onishi, KhanhTin Nguyen, Yoshitaka Komuro | 2023-07-18 |
| 11693316 | Resist composition and method of forming resist pattern | KhanhTin Nguyen, Nobuhiro MICHIBAYASHI | 2023-07-04 |
| 11667605 | Resist composition, method of forming resist pattern, compound, acid generator, and method of producing compound | Hiroto Yamazaki, Yoshitaka Komuro | 2023-06-06 |
| 11644751 | Resist composition and method of forming resist pattern | Junichi Miyakawa, Takashi Nagamine | 2023-05-09 |
| 11635687 | Resist composition and method of forming resist pattern | Junichi Miyakawa, Takashi Nagamine | 2023-04-25 |