Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762288 | Resist composition, method of forming resist pattern, and acid diffusion-controlling agent | Seiji Todoroki, Masahiro SHIOSAKI, Nobuhiro MICHIBAYASHI | 2023-09-19 |
| 11667605 | Resist composition, method of forming resist pattern, compound, acid generator, and method of producing compound | Masatoshi Arai, Yoshitaka Komuro | 2023-06-06 |