Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11780946 | Alternating copolymer, method of producing alternating copolymer, method of producing polymeric compound, and method of forming resist pattern | Akiyoshi Yamazaki, Daisuke Kawana, Yoshitaka Komuro, Masatoshi Arai, Takatoshi Inari | 2023-10-10 |
| 11762288 | Resist composition, method of forming resist pattern, and acid diffusion-controlling agent | Hiroto Yamazaki, Seiji Todoroki, Masahiro SHIOSAKI | 2023-09-19 |
| 11693316 | Resist composition and method of forming resist pattern | KhanhTin Nguyen, Masatoshi Arai | 2023-07-04 |