Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11843027 | Method of manufacturing semiconductor device | Syuji NOZAWA | 2023-12-12 |
| 11815407 | Thermocouple structure, heat treatment apparatus, and method of manufacturing thermocouple structure | Hisashi Inoue, Masahiro Kobayashi, Yasuaki Kikuchi, Koji Yoshii, Kensuke Morita +1 more | 2023-11-14 |
| 11784070 | Heat treatment apparatus, heat treatment method, and film forming method | Yasuaki Kikuchi, Kazuteru Obara, Ryuji Kusajima | 2023-10-10 |
| 11694891 | Film forming apparatus and film forming method | Syuji NOZAWA | 2023-07-04 |
| 11674224 | Film forming method and film forming apparatus | Yasuaki Kikuchi, Kazuteru Obara, Ryuji Kusajima | 2023-06-13 |
| 11581201 | Heat treatment apparatus and film deposition method | Kazuteru Obara, Yasuaki Kikuchi, Ryuji Kusajima, Shinya Nasukawa, Kazuyuki Kikuchi | 2023-02-14 |
| 11569098 | Heat treatment apparatus | Yasuaki Kikuchi | 2023-01-31 |