Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581201 | Heat treatment apparatus and film deposition method | Kazuteru Obara, Tatsuya Yamaguchi, Yasuaki Kikuchi, Ryuji Kusajima, Kazuyuki Kikuchi | 2023-02-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581201 | Heat treatment apparatus and film deposition method | Kazuteru Obara, Tatsuya Yamaguchi, Yasuaki Kikuchi, Ryuji Kusajima, Kazuyuki Kikuchi | 2023-02-14 |