Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784070 | Heat treatment apparatus, heat treatment method, and film forming method | Yasuaki Kikuchi, Tatsuya Yamaguchi, Kazuteru Obara | 2023-10-10 |
| 11674224 | Film forming method and film forming apparatus | Yasuaki Kikuchi, Tatsuya Yamaguchi, Kazuteru Obara | 2023-06-13 |
| 11581201 | Heat treatment apparatus and film deposition method | Kazuteru Obara, Tatsuya Yamaguchi, Yasuaki Kikuchi, Shinya Nasukawa, Kazuyuki Kikuchi | 2023-02-14 |