Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784070 | Heat treatment apparatus, heat treatment method, and film forming method | Yasuaki Kikuchi, Tatsuya Yamaguchi, Ryuji Kusajima | 2023-10-10 |
| 11674224 | Film forming method and film forming apparatus | Yasuaki Kikuchi, Tatsuya Yamaguchi, Ryuji Kusajima | 2023-06-13 |
| 11656126 | Heat treatment apparatus and temperature control method | Koji Yoshii, Yuki Wada, Hitoshi Kikuchi | 2023-05-23 |
| 11581201 | Heat treatment apparatus and film deposition method | Tatsuya Yamaguchi, Yasuaki Kikuchi, Ryuji Kusajima, Shinya Nasukawa, Kazuyuki Kikuchi | 2023-02-14 |