Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11843027 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi | 2023-12-12 |
| 11694891 | Film forming apparatus and film forming method | Tatsuya Yamaguchi | 2023-07-04 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11843027 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi | 2023-12-12 |
| 11694891 | Film forming apparatus and film forming method | Tatsuya Yamaguchi | 2023-07-04 |