Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742226 | Substrate liquid processing apparatus | Takahiko Otsu, Kazuya Koyama | 2023-08-29 |
| 11724235 | Mixing apparatus, mixing method and substrate processing system | Jun Nonaka, Kouji Ogura | 2023-08-15 |