TO

Takahiko Otsu

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #234,520 of 537,848Top 45%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11742226 Substrate liquid processing apparatus Kazuya Koyama, Takao Inada 2023-08-29