Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742226 | Substrate liquid processing apparatus | Takahiko Otsu, Takao Inada | 2023-08-29 |
| 11723259 | Substrate processing apparatus and method of processing substrate | Koukichi Hiroshiro, Jun Nonaka, Mitsunori Nakamori | 2023-08-08 |