Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11724235 | Mixing apparatus, mixing method and substrate processing system | Takao Inada, Kouji Ogura | 2023-08-15 |
| 11723259 | Substrate processing apparatus and method of processing substrate | Koukichi Hiroshiro, Kazuya Koyama, Mitsunori Nakamori | 2023-08-08 |