Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11724235 | Mixing apparatus, mixing method and substrate processing system | Jun Nonaka, Takao Inada | 2023-08-15 |
| 11615971 | Substrate processing apparatus and processing liquid concentration method | Teruaki Konishi, Kouzou Kanagawa, Osamu Kuroda, Koji Tanaka, Kotaro Tsurusaki +2 more | 2023-03-28 |