Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851318 | MEMS device and method for making the same | Ching-Kai Shen, Jung-Kuo Tu, Wei-Cheng Shen, Xin-Hua Huang, Wei-Chu Lin | 2023-12-26 |
| 11807520 | Semiconductor structure and method for manufacturing thereof | Ching-Kai Shen, Jung-Kuo Tu | 2023-11-07 |
| 11772960 | Method of forming dielectric and metal sealing layers on capping structure of a MEMs device | Ching-Kai Shen, Wei-Chu Lin, Hung-Wei Liang, Jung-Kuo Tu | 2023-10-03 |
| 11730058 | Integrated heater (and related method) to recover degraded piezoelectric device performance | Alexander Kalnitsky, Chun-Ren Cheng, Chi-Yuan Shih, Kai-Fung Chang, Shih-Fen Huang +3 more | 2023-08-15 |